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X-ray Photoelectron
Spectroscopy / XPS
PHI Quantera II™ |
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Superior
Performance meets outstanding operational environments
By introducing the new developed pulsed ion source,
the nanoTOF II has been further improved, which
is based on being excellent at high ion transmission
of superior triple focusing electrostatic analyzer
(TRIFT analyzer).
It also has a more pleasant operating environment
due to renovated software.
It is a state-of-the-art TOF-SIMS with wide variety
of options to choose from depending on the customer’s
application. |
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TRIFT™ analyzer suitable for rough surfaced
samplesTRIFT™ analyzer suitable for rough surfaced samples
Triple focusing electrostatic analyzer (TRIFT analyzer) simultaneously
achieves high mass resolution and extreme sensitivity with its
broad energy band-pass and large solid angle.
Deep depth of focus exceeding 100 μm enables to obtain clear
images with minimizing effects of surface roughness.
Triple focusing electrostatic analyzer (TRIFT analyzer) simultaneously
achieves high mass resolution and extreme sensitivity with its
broad energy band-pass and large solid angle.
Deep depth of focus exceeding 100 μm enables to obtain clear
images with minimizing effects of surface roughness.
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| Micro to Large Area
XPS |
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ULVAC-PHI has been successful in improving the
quality of the patented monochromatic, micro-focused, scanning
x-ray source which is the core technology of the PHI Quantera
II. Improvements in the quality of the monochromatic crystal
enabled the x-ray beam size down to 7.5 μm in diameter. Micro
area XPS sensitivity has also improved by 20%.
The PHI Quantera II can also perform high resolution average,
area, linear, and multi-point analyses of large areas by using
both high-speed XPS and dynamic emittance matching. |
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| Highest Small Area XPS Sensitivity |
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SXI Image
The SXI image is an image of the secondary electrons, excited
by the micro-focused x-ray source, taken in by the analyzer.
Using the actual x-ray used for analyzing enables accurate
and quicker point and click analysis area definition.
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| High Resolution Intro
Camera |
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| We can determine the analyzing point from
the high resolution photo take at the introduction chamber.
The digital zoom function enables accurate and quick navigation. |
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| Optional Sample Positioning Station |
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The sample positioning station is a digital XY coordinate
device using an optical microscope. This device will help
navigate the analyzing point by using the image taken by the
optical microscope and the point on the digital XY coordinate.
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