XPS
 
X-ray Photoelectron Spectroscopy / XPS
PHI Quantera II™
 
 
Superior Performance meets outstanding operational environments

By introducing the new developed pulsed ion source, the nanoTOF II has been further improved, which is based on being excellent at high ion transmission of superior triple focusing electrostatic analyzer (TRIFT analyzer).
It also has a more pleasant operating environment due to renovated software.
It is a state-of-the-art TOF-SIMS with wide variety of options to choose from depending on the customer’s application.
 
TRIFT™ analyzer suitable for rough surfaced samplesTRIFT™ analyzer suitable for rough surfaced samples

Triple focusing electrostatic analyzer (TRIFT analyzer) simultaneously achieves high mass resolution and extreme sensitivity with its broad energy band-pass and large solid angle.

Deep depth of focus exceeding 100 μm enables to obtain clear images with minimizing effects of surface roughness.

Triple focusing electrostatic analyzer (TRIFT analyzer) simultaneously achieves high mass resolution and extreme sensitivity with its broad energy band-pass and large solid angle.

Deep depth of focus exceeding 100 μm enables to obtain clear images with minimizing effects of surface roughness.

Micro to Large Area XPS
 
ULVAC-PHI has been successful in improving the quality of the patented monochromatic, micro-focused, scanning x-ray source which is the core technology of the PHI Quantera II. Improvements in the quality of the monochromatic crystal enabled the x-ray beam size down to 7.5 μm in diameter. Micro area XPS sensitivity has also improved by 20%.

The PHI Quantera II can also perform high resolution average, area, linear, and multi-point analyses of large areas by using both high-speed XPS and dynamic emittance matching.
 
 
 
Highest Small Area XPS Sensitivity
 

SXI Image

The SXI image is an image of the secondary electrons, excited by the micro-focused x-ray source, taken in by the analyzer. Using the actual x-ray used for analyzing enables accurate and quicker point and click analysis area definition.

 
 
High Resolution Intro Camera
 
We can determine the analyzing point from the high resolution photo take at the introduction chamber. The digital zoom function enables accurate and quick navigation.
 
 
 
Optional Sample Positioning Station
 

The sample positioning station is a digital XY coordinate device using an optical microscope. This device will help navigate the analyzing point by using the image taken by the optical microscope and the point on the digital XY coordinate.

 
 
 
 
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