X-ray Photoelectron Spectroscopy / XPS
PHI Quantes
Dual Scanning X-ray Photoelectron Microprobe Equipped with Hard X-Ray

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PHI 5000 VersaProbe III
Multi-technique scanning XPS microprobe that provides the highest performance spectroscopy with a sophisticated equipment design.
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PHI Quantera II™
The world's highest performance XPS microprobe that provides automated micro-area spectroscopy.
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PHI X-tool
This high performance scanning XPS instrument comes with a low price yet makes measurements for all types of applications and features easy, intuitive operation.
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Auger Electron Spectroscopy / AES, SAM
PHI 710
The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.
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PHI 4700 Thin Film Analyzer™
The analyzer employs a high sensitivity energy analyzer having the world's best Auger sensitivity of 1.6 Mcps (10 nA for current value).
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Time-of-Flight SIMS / TOF-SIMS
This new TOF-SIMS instrument has the added flexibility needed to support diversified analysis application and also provides automated measurement from sample loading through to measurement.
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MS/MS Option

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Dynamic SIMS / D-SIMS
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Other Systems
Other Systems
Customized systems for surface analysis tasks
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▶ Ion Gun / FIG-5 Package
Database / Software
▶ PHI MultiPak™
Handbook of X-ray Photoelectron Spectroscopy
▶ Handbook of Auger Electron Spectroscopy
▶ Surface Analysis by Auger and X-ray
     Photoelectron Spectroscopy
TOF-SIMS: Surface Analysis by Mass Spectrometry
▶ XPS Polymer Database
▶ Static SIMS Library