X-ray Photoelectron Spectroscopy / XPS
 
 
PHI Quantes
 
Dual Scanning X-ray Photoelectron Microprobe Equipped with Hard X-Ray

 
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PHI 5000 VersaProbe III
 
Multi-technique scanning XPS microprobe that provides the highest performance spectroscopy with a sophisticated equipment design.
 
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PHI Quantera II™
 
The world's highest performance XPS microprobe that provides automated micro-area spectroscopy.
 
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PHI X-tool
 
This high performance scanning XPS instrument comes with a low price yet makes measurements for all types of applications and features easy, intuitive operation.
 
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Auger Electron Spectroscopy / AES, SAM
 
 
PHI 710
 
The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.
 
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PHI 4700 Thin Film Analyzer™
 
The analyzer employs a high sensitivity energy analyzer having the world's best Auger sensitivity of 1.6 Mcps (10 nA for current value).
 
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Time-of-Flight SIMS / TOF-SIMS
 
 
PHI nanoTOF II™
 
This new TOF-SIMS instrument has the added flexibility needed to support diversified analysis application and also provides automated measurement from sample loading through to measurement.
 
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MS/MS Option
 




 
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Dynamic SIMS / D-SIMS
 
 
PHI ADEPT-1010™
 
 
 
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Other Systems
 
 
Other Systems
 
Customized systems for surface analysis tasks
 
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Components
 
▶ Ion Gun / FIG-5 Package
 
▶ Ion Gun / USG-3 Package
 
▶ X-ray Source / PHI 1248 Package
 
 
Database / Software
 
▶ PHI MultiPak™
 
Handbook of X-ray Photoelectron Spectroscopy
 
▶ Handbook of Auger Electron Spectroscopy
 
▶ Surface Analysis by Auger and X-ray
     Photoelectron Spectroscopy
 
TOF-SIMS: Surface Analysis by Mass Spectrometry
 
▶ XPS Polymer Database
 
▶ Static SIMS Library